Machine Specifications
|
| Probe Station PM8 |
| 1) Chuck diameter: |
200 mm (8 inches) |
| 2) X and Y moving range of chuck: |
200 mm by 200 mm (coarse)
10 mm by 10 mm (fine) |
| 3) Z moving range of chuck: |
10 mm |
| 4) Chuck rotation range |
±9° |
| 5) Platen height adjustment range: |
45 mm
|
| Microscope (Mitutoyo FS60YC) |
| 1) Objective lens: |
2x, 10x, 20x & 50x |
| 2) Eyepiece: |
10x |
| 3) X and Y moving range: |
100 mm by 100 mm
|
| Optional accessories |
| Probe head (PH120) |
| 1) Travel range: |
8 mm in X, Y & Z directions |
| 2) Feature resolution: |
3 um
|
| Probe head (PH150) |
| 1) Travel range: |
10 mm in X & Y directions
8 mm in Z direction |
| 2) Feature resolution: |
< 0.5 um
|
| Passive probe needles |
| 1) T-4-10 |
probe tip radius < 0.1 um
|
| 2) ST-20-0.5 |
probe tip radius < 0.5 um
|
| 3) ST-20-2 |
probe tip radius < 2.0 um
|
| 4) T-4-125 |
probe tip radius < 5.0 um
|
| 5) ST-20-10NP |
probe tip radius < 10.0 um
|
