The Leica INM100 is a universal inspection microscope for the semiconductor and microelectronics industry. The microscope's most impressive features are its ultra high optical performance, ergonomy and easy operation. The use of different imaging modes (brightfield, darkfield, differential interference contrast and confocal mode) makes it easier for inspecting samples and locating defects.

With the confocal module, enhanced contrast, higher resolution and limited depth of field can be achieved. Inspection of multi-layer structure can greatly benefit from this feature. The microscope has a manual stage with the capability of holding 8-inch wafer. Inspection of samples can be made more convenient.